STACIS 4

  • Manufactured by: TMC

Quick Overview

STACIS® 4 is the most advanced active vibration isolation system commercially available. Employing inertial vibration sensors, sophisticated control algorithms, and state-of-the-art piezoelectric actuators, STACIS cancels vibration in real time by continuously measuring floor activity, then expanding and contracting piezoelectric actuators t..

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Description

STACIS® 4 is the most advanced active vibration isolation system commercially available. Employing inertial vibration sensors, sophisticated control algorithms, and state-of-the-art piezoelectric actuators, STACIS cancels vibration in real time by continuously measuring floor activity, then expanding and contracting piezoelectric actuators to filter out floor motion. The all new STACIS 4 builds upon the success of our proven STACIS technology, which is used by 9 of the top 10 semiconductor manufacturers worldwide.

 

 

 

 

Initially designed to isolate precision microlithography, metrology, and inspection equipment in advanced semiconductor factories, STACIS is now the industry standard solution for the most sensitive instruments in noisy environments, including but not limited to applications such as, failure analysis, nanotechnology research, nanofabrication, structural biology, and materials research.

 

STACIS 4 includes a new and improved, lower noise, digital controller, the DC-2020 with a dual-core processor . This new advanced control system provides the user with an easy to use Graphical User Interface (GUI).

 

STACIS 4 builds on the advanced architecture of previous generations by adding advanced control algorithms and new patented technology. The results are previously unachievable vibration cancellation of building floor vibration at all frequencies, but particularly below 10Hz, where high resolution imaging and metrology is most sensitive. When combined with patented FloorSense™ technology, STACIS 4 reduces building floor vibration by 60 dB at 2 Hz and 27dB at 1Hz. 

 

Stacis 4 curves

 

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