Product Tag(s):

CIS100, CIS200 & CIS300 Closed Ion Source Gas Analyzers

  • Manufactured by: SRS Stanford Research Systems

Quick Overview

 

With better than 1 ppm detection limit, direct sampling at mTorr pressure, and a user-friendly Windows software package, the CIS systems will satisfy your most demanding applications. On-line process monitoring and control, verification of process gas purity at the po..

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Description

 

With better than 1 ppm detection limit, direct sampling at mTorr pressure, and a user-friendly Windows software package, the CIS systems will satisfy your most demanding applications. On-line process monitoring and control, verification of process gas purity at the point of use, high-vacuum residual gas analysis, and process equipment leak checking are some of the areas where these systems will prove indispensable.

 

 

 

  • 100, 200, and 300 amu systems
  • 1 ppm detection
  • 10 mTorr max. operating pressure
  • 1 x 10-12 Torr detection limit
  • Real-time RGA Windows software
  • Multi-head operation
  • Field-replaceable electron multiplier and filament
  • RGA and CIS mode

 

Compact Design

The probe consists of a quadrupole mass spectrometer with a CIS ionizer mounted inside a 2.75" Conflat Tee. The control unit mounts directly on the probe’s feedthrough flange and contains all the necessary electronics for operating the instrument. The side port of the CIS nipple provides a connection for the differential pumping system that keeps the quadrupole, filament and detector at high vacuum. The system can be connected directly to a process chamber through its standard CIS mounting flange (2.75" CF). All parts in the unit are self-aligning making servicing easy. You can clean and reassemble the probe, and replace the filament and electron multiplier in the field, without ever calling the factory.
 

 


Datasheet (PDF file)

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