QMS100, QMS200 & QMS300 High Pressure Gas Analyzers

Manufactured by: SRS Stanford Research Systems

Quick Overview

100, 200 or 300 amu systems
Pressures from 10 mbar to 1 bar
Better than 1 amu resolution
<0.5 second response time
Compact, transportable design
6 decades of dynamic range
RGA Windowssoftware
RS-232 computer interface

QMS series ..

Description

Description

100, 200 or 300 amu systems
Pressures from 10 mbar to 1 bar
Better than 1 amu resolution
<0.5 second response time
Compact, transportable design
6 decades of dynamic range
RGA Windowssoftware
RS-232 computer interface

QMS series gas analyzers offer an efficient, cost-effective solution for a wide range of applications. These mass spectrometers simplify the task of on-line process monitoring, analysis of gas species, leak detection, and troubleshooting.

On-Line Monitoring

The QMS system can continuously sample gas at flow rates of several milliliters per minute. The inlet can be equipped to sample at pressures from 1 bar to 10 mbar. Data is acquired continuously, as opposed to batch sampling which is employed by gas chromatographs.The QMS has a fast response time of less than 0.5 seconds. Complete spectra can be recorded in seconds, and individual masses can be measured at rates up to 25 points per second.

Compact, User-Friendly Design

An advanced quadrupole mass spectrometer design, coupled with state-of-the-art pumping technology, allows the entire system to be integrated in a small, transportable package. The sampling inlet valves and pumps can be controlled from the front panel. Operation is easy and does not require a detailed understanding of the quadrupole or the pressure reducing inlet. Since the pumps contain no oil or other liquids, gravity has no effect on them which allows the unit to function either standing upright or laid on its side. Capillaries are used as sampling probes and are available in several materials and sizes for different applications.

Principle of Operation

The QMS uses a two stage pressure reducing inlet to sample gases at high pressure. This allows the use of a residual gas analyzer (which operates at high vacuum) as the detector. Different capillaries permit the system to sample at higher or lower pressures. A large flow is drawn through the capillary which drops the pressure three decades. A hybrid turbomolecular/drag pump draws a small amount of gas through an aperture, which reduces the pressure to about 10-⁶Â Torr, while most of the flow is bypassed directly to a diaphragm pump. Solenoid valves control the gas flow. The entire system is controlled by a microprocessor which ensures correct operation of the pumps and valves. The software manages the spectrometer and acquires data in a choice of six different modes. An optional high-vacuum 2.75" CF port provides direct access to the RGA.

Datasheet (PDF file)